High-fidelity synthesis of slender defects via single-image-based latent blending for data-driven defect inspection

Author

*Jeongmin Lee, *Yunhyoung Nam, Young-joo Kim, Jihye Lee, and Do-Nyun Kim

Journal

IEEE Transactions on Semiconductor Manufacturing

Status

in press

Year

2026

Date

2026-08-01

Link

https://ieeexplore.ieee.org/document/11643305 9회 연결